Detailed characterization of the Ti-O based thin films obtained by cathodic arc evaporation

Characterization of TiN, CrN and (Ti, Cr) N Coatings Deposited by Cathodic ARC Evaporation

In this investigation PVD Ti-Cr)N coatings were deposited on hardened and tempered tool steel substrates using reactive arc evaporation. Physical and mechanical properties of coatings such as roughness, thickness, phase composition, hardness and modulus young and coefficient friction were evaluated. Phase compositions were studies by X-ray diffraction method. The surface microstructure and morp...

COMPARISON OF THE CrN , TiN AND (Ti, Cr)N PVD COATINGS DEPOSITED BY CATHODIC ARC EVAPORATION

In the present study, CrN, TiN and (Ti, Cr)N coatings were deposited on D6 tool steel substrates. Physical and mechanical properties of coatings such as microstructure, thickness, phase composition, and hardness were evaluated. Phase compositions were studies by X-ray diffraction method. Mechanical properties were determined by nano-indentation technique. The friction and wear behaviour of the ...

Cathodic Arc Synthesis of Ti-Si-C-N Thin Films from Ternary Cathodes

Cathodic Arc Synthesis of Ti-Si-C-N Thin Films Plasma Analysis and Microstructure Formation

ii The cover image is based on a photograph of arc spots moving on the surface of a Ti cathode, taken during the first experimental session in our new PVD research system, Hydra. The explosive plasma generation in the arc spots is central to the cathodic arc deposition technique, studied and used extensively for synthesis in the Thesis. Abstract This Thesis explores the arc deposition process a...

Electronic state characterization of SiOx thin films prepared by evaporation

SiOx thin films with different stoichiometries from SiO1.3 to SiO1.8 have been prepared by evaporation of silicon monoxide in vacuum or under well-controlled partial pressures of oxygen sP,10−6 Torrd. These thin films have been characterized by x-ray photoemission and x-ray-absorption spectroscopies, this latter at the Si K and L2,3 absorption edges. It has been found that the films prepared in...